Process Capability

Etching Process

Dry Etching

  • Deep ICP Etcher 
  • Metal Etcher
  • Poly Si Etcher
  • Oxide/ SiN Etcher

 

Wet Etching 

  • Wafer Cleaning Bench
  • PR Stripper
  • Metal Etcher
  • Oxide Etcher
  • SiN Etcher
  • Metal Lift-off 
  • KOH Etcher with ECE Stop
  • Scrubber for Particle Removal

 

 
 
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