Process Capability

Metrology

  • SEM 
  • White Light Interferometer
  • IR Microscope
  • Energy Dispersive X-ray Spectroscopy


     

 

  • Film Thickness Measurement 
  • CD Measurement
  • Defect Inspection 
  • Surface Profiler

 

 

 

  • Film Stress Measurement 
  • Sheet Resistance Measurement (4-point probe)
  • CV Measurement
  • FTIR
  • Implant Dose Metrology Measurement
  • Surface Analysis such as Auger, SIMS, AFM (external partner)

 
 
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