製程能力

蝕刻製程

乾式蝕刻

  • DRIE
  • Metal Etcher
  • Poly Si Etcher
  • Oxide / SiN Etcher

 

 

 

濕式蝕刻

  • Wafer Cleaning Bench
  • PR Stripper
  • Metal Etcher
  • Oxide Etcher
  • SiN Etcher
  • Metal Lift-off
  • KOH Etcher with ECE Stop
  • Scrubber for Particle Removal

 

 
 
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