乾式蝕刻

• DRIE
• Metal Etcher
• Poly Si Etcher
• Oxide / SiN Etcher

濕式蝕刻

• Wafer Cleaning Bench
• PR Stripper
• Metal Etchant
• Oxide Etchant
• SiN Etchant
• Metal Lift-off
• KOH Etching with ECE Stop