Thermopile
Layout design comes from customer.
Fixed process (film stacking and thickness) but adjustable poly sheet resistance.
1P2M and 2P2M with backside release
Large suspended diaphragm, over 1.0 mm2
Better efficiency with an additional black absorber layer
Cumulative Shipments: Over 14,000 wafers
For further information, please feel free to contact us via the following email address. sales@apmsinc.com
