Thermal Isolation Devices
Suitable for thermal isolation devices (Flow, Gas, Temperature, etc.)
Layout design comes from customer.
Fixed process (film stacking and thickness) but adjustable Pt thickness (≤ 2000A)
Reliable adhesion layer for Pt to base film & passivation
Proper film composition with stress balance
Suspended diaphragm for high-temperature operation (heater > 650°C)
Integration of Pt heater & RTD or thermopile temperature sensor
Small sensing area, less than 1.0 mm2
For further information, please feel free to contact us via the following email address. sales@apmsinc.com
