量測分析

• SEM / EDS (Energy Dispersive X-ray Spectroscopy)
• White Light Interferometer
• IR Microscope

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• Film Thickness Measurement
• CD Measurement
• Defect Inspection
• Surface Profiler

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• Film Stress Measurement
• Sheet Resistance Measurement (4-point probe)
• FTIR
• Surface Analysis such as Auger, SIMS, AFM (external partner)