Dry Etching

• DRIE 
• Metal Etcher
• Poly Si Etcher
• Oxide/ SiN Etcher

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Wet Etching

• Wafer Cleaning Bench
• PR Stripper
• Metal Etchant
• Oxide Etchant
• SiN Etchant
• Metal Lift-off 
• KOH Etching with ECE Stop