• Suitable for thermal isolation devices (Flow, Gas, Temperature, etc.)
• Layout design comes from customer.
• Fixed process (film stacking and thickness) but adjustable Pt thickness (≤ 2000A)
• Reliable adhesion layer for Pt to base film & passivation
• Proper film composition with stress balance
• Suspended diaphragm for high-temperature operation (heater > 650°C)
• Integration of Pt heater & RTD or thermopile temperature sensor
• Small sensing area, less than 1.0 mm²

For further information, please feel free to contact us via the following email address. sales@apmsinc.com