MEMS Express: Process Platforms

Pressure Sensor



  • Generic platform with customized options

  • Leverage the mature process modules to shorten the time to market

  • Wide pressure range to fulfill variety of aspects of requirements

  • Uniform performance and output across a whole wafer

  • Samples available for quick evaluation



KOH etched cavity    /    Typical PS with glass pedestal    /    Smaller absolute PS with embedded cavity    /    Back-entry Absolute PS



APM Pressure Sensor Standard Sample List




For further information, please feel free to contact us via the following email address.