MEMS Express: Process Platforms

Pressure Sensor

 

 

  • Generic platform with customized options

  • Leverage the mature process modules to shorten the time to market

  • Wide pressure range to fulfill variety of aspects of requirements

  • Uniform performance and output across a whole wafer

  • Samples available for quick evaluation

 

 

KOH etched cavity    /    Typical PS with glass pedestal    /    Smaller absolute PS with embedded cavity    /    Back-entry Absolute PS

 

 

APM Pressure Sensor Standard Sample List

 

 

 

For further information, please feel free to contact us via the following email address. sales@apmsinc.com

 

 

 
 
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